electron cyclotron resonance：電子回旋加速器共振

電子組態(tài) Electron configuration | 電子回旋加速器共振 electron cyclotron resonance | 電子回旋加速器共振蝕刻系統(tǒng) electron cyclotron resonance etching system

diameter：孔徑

均需要透過黃光顯影與蝕刻步驟形成Via,目前則以深反應離子蝕刻(Deep Reactive Ion Etching;DRIE)技術為主,Via孔徑(Diameter)多在20μm以下,受限目前技術孔徑 ...3-3 后制程步驟與結果 依據MEMS元件在CMOS標準制程中制作的先后順 序分類,

Bright Dip：輝面浸漬

bright coal 輝煤 | bright dip 輝面浸漬 | bright etching 光亮蝕刻

electrolytic dissociation：電[解]離解

electrolytic discharge aided grinding machine 電解放電輔助研磨機 | electrolytic dissociation 電[解]離解 | electrolytic etching 電 [解]浸蝕

fine dotted line：細虛線

fine detail 細節(jié) | fine dotted line 細虛線 | fine etching 精密蝕刻

track driving wheel：履帶驅動輪

track drill 鐵軌鉆 | track driving wheel 履帶驅動輪 | track etching dosimeter 徑跡蝕刻劑量計

EDG：abbr. etching diffracting grating; 蝕刻衍射光柵

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Electron diffraction pattern：電子繞射圖

電子回旋加速器共振蝕刻系統(tǒng) electron cyclotron resonance etching system | 電子繞射圖 Electron diffraction pattern | 電子線繞射 Electron diffratction

lateral encroaching：橫向腐蝕

lateral doping profile 橫向雜質分布圖 | lateral encroaching 橫向腐蝕 | lateral etching 橫向腐蝕

lateral encroaching：橫向腐蝕Xmj中國學習動力網

lateral doping profile 橫向雜質分布圖Xmj中國學習動力網 | lateral encroaching 橫向腐蝕Xmj中國學習動力網 | lateral etching 橫向腐蝕Xmj中國學習動力網