Five novel torsion-mirror optical actuators including double-beam thickness differential structure with single torsional axis, double flexible folded-beam structure with single torsional axis, double-beam vertical torsion comb structure with single torsion axis, four-beam differential compound-micromirror structure with double torsional axis and the combined structure of the four basis forms above, are brought forward. All of these devices could be fabricated by the same silicon micromachining process we have developed. The deformation compensation design with local enhancement for the thin torsional beam which is the key structure of these devices is also put forward to improve the reliability. The three-dimension solid model and two-dimension reduced order model of the torsion-mirror optical actuator are established and then the numerical simulations for evaluating the device characteristics of the statics, dynamics, electrostatic field, mechanical and electrostatic coupling, fluid and solid coupling are carried out to optimize the structure design. Furthermore, three optical fibre clamping structures which could be integrated monolithicly are designed and analyzed to improve the optical coupling capability. 4. Three flexible process flows combined with bulk silicon micromachining and surface silicon micromachining are brought forward to fabricate these novel single-crystal silicon or polysilicon torsion-mirror optical actuators by using the same lithography masks for both SOI wafer and regular silicon wafer. A series of important process experiments are carried out to optimize the process parameters and the process flows. Some novel and typical process phenomena which occurred during the microfabrication are analyzed and then the corresponding solutions are put forward. 5. A MEMS dynamic testing system which exploit blur image synthetic technique, stroboscopic image matching technique, stroboscopic mirau microscopic interferometry technique and microscopic laser dopper vibrometer technique is set up to measure three-dimension and six-freedom micro motions of any MEMS devices with nanometer resolution.

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Secondly, three kinds of mathematics model of optical vortex beams were introduced here. Then the propagation dynamics of optical vortex beams through the non-axis symmetry system is studied, this chapter includes the introduction of the symmetry vortex beam and the non- symmetry vortex beam, the deduction of the Collins diffract integral formula for the non-axis symmetry system, and the transformation of the vortex beam passing through the non-axis symmetry system has been described by using the numerical simulation. Then the general calculation for the orbit momentum of vortex beams, the matrix form for the orbit momentum of vortex beams, and the photon method to describe the orbit momentum of vortex beams are also introduced here. Finally, the interference about optical vortex beams was studied.

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This dissertation realizes one open architecture computer numerical control system for three axis numerical control engraving and milling machine using computer software, hardware and DSP technologies.

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Support has been provided for that annulus fluid instances were numerical simulated with PHOENICS, PHOENICS is used to set up a numerical model of power-law fluid in a concentric annulus flow, by comparing the numerical simulation results for the axis velocity of the power-law fluid in a concentric annulus flow with two dimensional PIV experimental results.

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Based on the analysis of application of numerical control worktable, the design requirements for a virtual axis NC worktable are presented. A new three-translation and one-rotation 4-DOF parallel robot mechanism is constructed according to the design requirements and it acts as the primary mechanism of the virtual axis worktable.

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Research on the Basic Kinematics-Geometry Theory and Tool Positioning Strategy for 5-axis NC Machining;2. The paper introduces the construction features of undevelopable ruled surface integral impeller and two 5-Axis numerical control mill machining methods of vane shape which are "line contact" and "point contact".

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Research on the Basic Kinematics-Geometry Theory and Tool Positioning Strategy for 5-axis NC Machining;2. The paper introduces the construction features of undevelopable ruled surface integral impeller and two 5-Axis numerical control mill machining methods of vane shape which are "line contact" and "point contact".

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The above problems are studied in this thesis. First, the implicit NND scheme with mix flux splitting method proposed by Zhang Hanxin that is first order accurate in time and second order in space is modified. The modified scheme keeps the characteristics of fast convergence and is second order accurate both in time and space. It can be capable of simulating the unsteacly flow. Second, the topological method founded by Zhang Hanxin is improved to study the characteristics of vortex near the singular point on its axis and the cross streamlines on the longitudinal section passing the vortex axis. On the basis of topological results, a program which visualises numerical results is made out. It can help us analyse the characteristics of vortex motion.

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